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Sputtering Power Supplies

Sputtering Power Supplies

Sputtering Power Supplies

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There are several types of power supplies used in magnetron sputtering, these include DC, RF, Pulsed DC, MF AC, and HIPIMS. Below is a brief description outlining the differences between these power types.

DC Direct Current Sputtering Power

DC Power is generally used with electrically conductive target materials. It is easy to control and a low cost option.

RF Radio Frequency Sputtering Power

RF Power can be used with all materials, but generally finds most use in depositing films from dielectric target materials. The deposition rate (driven by the relative duty cycle) when compared to DC is generally quite low and the electron flux (due to the mobility difference of electrons and ions in a plasma) on the substrate is much higher and may cause significant heating. Due to the major cost considerations of RF power supplies, RF deposition is generally limited to smaller substrate sizes.

Pulsed DC Sputtering Power

Pulsed DC (variable frequency) has found broad application in reactive sputtering applications where a positive voltage spike, induced at some frequency on the power waveform can be used to clean the target face and eliminate the buildup of a thick dielectric layer which can be prone to arcing. Frequency ranges from 40 to 200 KHz are typically used. This approach is commonly referred to as uni-polar pulsed sputtering. Another option known as bi-polar pulsed sputtering uses two pulses ,180 degrees out of phase, that are applied to two adjacent magnetrons  in which each magnetron alternates as both a cathode and anode, mitigating the effects of dielectric build-up and greatly reducing the disappearing anode effect. This technique has also found wide industrial use.

MF Mid Frequency AC Sputtering Power

MF Sputtering is typically used to deposit non-conductive materials. Two cathodes in a dual configuration are used and the AC current is switched between each cathode allowing the target surface to be cleaned with each reverse of the cycle. This reduces arcing by charge build up and eliminates the need for anode cleaning which provides long term process stability. MF sputtering is widely used in many in line production systems today.

HIPIMS

High Power Impulse Magnetron Sputtering is a emerging process which uses a high current pulse to greatly increase the ionization of the sputtering material. These ionized atoms have much higher energies than sputtered atoms in conventional magnetron sputtering and have been found to yield very dense and stable films.

For more information regarding Sputtering Power Supplies or to discuss your project, call 412-469-8466 or contact us online.

If you would like a quotation, please fill out this Power Supply Questionnaire.

Angstrom Management

product manager for PVD Materials, magnetrons, and vacuum deposition systems. During his tenure

 

Mr. Bernick designed and manufactured a full line of systems including resistive evaporation, electron beam evaporation, chemical vapor deposition, and magnetron sputtering systems.

 

In 1988, Mr. Bernick founded Angstrom Sciences, Inc. The company supplied PVD Materials and specialized in designing circular cluster assemblies with unique geometries for superconductivity research. Since then, the ONYX® -series has developed into a full line of circular, linear, and cylindrical magnetron sputtering cathodes for research and development through full-production industrial applications.

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Sales Management

Customer Service, and Supply Chain, and is an accomplished business leader with proven results managing global brands through the utilization of strong market and industry knowledge, designing effective product strategies and championing exceptionally successful teams.

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Angstrom Management

issues, coordinates procedural manuals and shipping for all Angstrom Sciences’ products.

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Sales Management

product line. Mr. Bachman is an expert in PVD materials and offers support through our worldwide distribution network. Prior to joining the company in 2004, Mr. Bachman worked for seven years

 

as an Inside Sales Specialist and Corporate Buyer for TW Metals, a nationwide full-line service center and distributor.

 

Mr. Bachman has over 20 years of experience in the materials industry and holds a B.A. in Economics from the University of Pittsburgh.

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Sales Management

lines. His main areas of focus are on Sales and Customer Service Providing exceptional support to customers both directly and through our Global Distribution Network. Before joining the company in 2023 Patrick worked for FedEx, and his prior experience with Logistics is beneficial to our commitment to timely delivery both domestically and internationally.

 

Mr. Werkmeister holds a B.S. in Marketing from Kent State University.

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Production Management

in October 2004 and was promoted to the position of Assembly Supervisor in 2019. As supervisor, Craig oversees a team of assembly personnel to ensure the accuracy, quality, and on-time delivery of all fulfilled orders.

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Production Management

Computer Design as well as Machine Design. Mr. Bruce has designed everything from small hand powered tools to Continuous Barge Unloaders, and Rotary Railcar Dumpers. Mr. Bruce holds an Associates Degree in Computer Aided Design from PTI.

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