Magnetron Sputtering
Angstrom Sciences’ magnetron sputtering cathodes are engineered to meet stringent thin film uniformity, target utilization, and sputter rate specifications. In addition to the advanced performance results provided by the profiled magnets and turbulent water flow of the Angstrom Advantage™, Angstrom Sciences’ sputtering cathodes offer a host of other efficiencies.
VERSATILE, COMPACT DESIGN
ONYX® magnetron sputtering cathodes are ultra compact and specially designed for compatibility with complex multi-cathode cluster assemblies. This versatile construction allows scalability, making ONYX® magnetrons an ideal option for system upgrades and retrofit applications.
TOTAL POWER COMPATIBILITY
Low impedance sputter heads are RF, DC, mid-frequency DC, pulsed DC, HiPIMS and microwave power compatible.
STANDARD FITTINGS
Angstrom Sciences utilizes ISO NW standard fittings and CF Conflat® metal seal flanges. All utilities are maintained at atmosphere and are accessed through standard O-ring compression fittings for ease of installation in any vacuum system.
HIGH PERFORMANCE
Angstrom Sciences’ magnetrons operate at low process pressures, in the 10-4 Torr range and can deliver practical power densities in excess of 300 watts per square inch. Higher power densities allow ONYX® magnetrons to maximize both the process coating zone and target utilization without compromising sputter rate.
BETTER FILM UNIFORMITY
Standard ONYX® magnetron sputtering cathodes routinely provide deposition uniformities in the ±3 – ±5% range; however, Angstrom Sciences provides magnet arrays to suite client specifications. And uniformity of ±0.1% has been achieved with an ONYX® magnetron.
CLEANER PROCESS
The addition of an anode shield permits operation at lower voltage and pressure, because the anode shield decreases the distance between the cathode and anode (ground plane). Shields also block debris from falling in the space between the anode and cathode, preventing electrical short circuits and arcing.
FULL RANGE OF SIZES
Angstrom Sciences’ circular magnetrons are available in 1-16 inch target diameters. Linear magnetrons are available in target widths of 1.5 to 12 inches and in target lengths from 1 to 14 feet. Rotating cylindrical magnetron sputtering cathode assemblies are designed to accommodate target diameters of 3 and 6 inches.
TOTAL COMMITMENT
Magnetron sputtering cathodes are Angstrom Sciences’ core product, and we are committed to making sure you have the highest quality sputter deposition tool. Every ONYX® magnetron is assured against flaws in workmanship and materials for 2 years – the longest warranty in the industry. We stand ready to provide you with any help you may need in specification, installation, start-up, and service.
