Patent Information
Angstrom Sciences, Inc. holds several patents on the technical features, including the use of profiled magnets and turbulent water flow, of the company’s magnetron sputtering cathode. Additionally, the company has patented a threaded target clamp and anode shield design on their circular ONYX® -series magnetrons.
Most recently, the company was awarded a patent on its rotary magnetrons, which utilize rotating magnets within a planar magnetron in order to improve target utilization and film uniformity.
A patent was also issued for Angstrom Sciences, Inc.’s rotating cylindrical magnetron, specially designed to optimize web, solar, and display applications.
